Ellipsometer GES5E from Sopra

FEATURES:

Automatic Goniometer:
GES5E with automatic goniometerare allows to automatically place the measurement angle (from 10° to 90°)  to the optimum angle of measurement, allowing also scatterometry.

Automatic Microspots:
Allows the user to focus the beam on a very small area of the sample. Spot down to 50 µm can be achieved for specific applications. Also used when measuring thin transparent substrate. It enables physical extraction from the measurement of the parasitic light coming from backside reflection of the substrate. The backside correction can of course be done thru the software but optical treatment avoids assumption on number of reflections.

Automatic Compensator/Retarder:
Recommended when measuring transparent materials on transparent substrate for example. The Cos Delta been close to +/- 1 this lead to low accuracy (proportional to 1/SinDelta). The retarder place the measure out of this area. It allows to measure the full angular range for Delta and Psi, thus to access depolarisation coefficient. Using appropriate formalism, it also allows to reach 12 coefficients of the Mueller Matrix.

Mapping stage:
Allow automatic cartography measurements on several types of substrates of variable dimensions. Mapping stage can be supplied fully automatic or for manual operation, X-Y (when anisotropy is present, patterned wafers), Rho-theta, combined stage (X_Y theta for generalized SE).

Visualization CCD Camera:
The ellipsometers is equipped with a visualization systems.