Ion Milling / Sputtering / E-Beam System from TSST
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Ion Milling / Sputtering / E-Beam System from TSST
Ion Milling/Sputtering/E-Beam from TSST is a system made up of a combination of three techniques in the same equipment. The system is furnished of an ion miller which allows to thin samples by argon (Ar) ions bombardment. Also it is possible to deposit gold (Au), silver (Ag), platinum (Pt) and copper (Cu) by DC sputtering and to evaporate several metals by electron beam.
FEATURES:
- General: load lock chamber with an annealing system at oxygen pressure. Rotating sample holder system.
- Ion Miller: gridded 4 cm diameter source with a beam voltage from 100 to 1200 V DC, and a beam current of about 100 mA.
- Sputtering: sputter sources for 1-inch Au, Ag, Pt and Cu sputter targets. Two DC sputtering guns with 600 W DC power supply with a single output channel and a maximum current of 1.3 A.
- Electron Beam: two evaporation sources with controlled evaporating flux, possibility to evaporate metals with molybdenum (Mo) crucible and in rods of between 2-6 mm diameter.
The equipment was co-funded by infrastructural projects (MINECO + FEDER) CSIC-13-4E-1798 y MINECO MAT2011-28874-CO2-01. Equipamiento cofinanciado por proyectos de infraestructura (MINECO + FEDER) CSIC-13-4E-1798 y MINECO MAT2011-28874-CO2-01.
CONTACT US
Phone: (+34) 935 801 853
Email:
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Tlf.: (+34) 935 801 853; ext. 363/335 |
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Tlf.: (+34) 935 801 853; ext. 364/335 |
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Tlf.: (+34) 935 801 853; ext. 365/335 |
EQUIPMENTS
- Atomic Layer Deposition System - Savannah from Cambridge NanoTech
- Basic II-Acids & Corrosives
- Basic I-Solvents
- Centrifuge - Allegra 64R from Beckman Coulter
- Dip Coater - DM 201 Automatic from Chemat Technology Inc.
- Drop Shape Analyzer - DSA 100 from KRÜSS
- Ellipsometer - GES5E from Sopra
- Evaporation System - Auto 306 from Boc Edwards
- Glove Box - GP(Concept)-II-P from JACOMEX
- Inert Atmosphere Chamber - from Trallero
- Inkjet Printer - ICMAB-CSIC
- Ion Milling / Sputtering / E-Beam System - TSST
- IR-Spectrometer - Vertex 70 from Bruker
- L5: Chemical Hood
- Spectrofluorometer - LS-45 from Perkin-Elmer
- Binocular Loupe
- Micro-Writer - Durham Magneto Optics LTD
- Microwave Oven - with controlled atmosphere Discover Explorer Hybrid from CEM
- Microwave Advanced Flexible Synthesis Platform (flexiWAVE) - Milestone
- Mini-Tubular Furnace
- Nano Dip Coater - ND-DC from NADETECH
- Optical Microscope - B-600 MET from OPTIKA
- Optical Microscope - Nikon Optiphot
- Photolithography Fume Hood
- Plasma Cleaner Zepto M2 - Diener Electronics
- Profilometer - P16+ from KLA Tencor
- Rapid Thermal Annealing System - from AS-micro
- Reactive Ion Etcher - RIE 2000 CE from South Bay Technology Inc.
- Rheometer - HAAKE RheoStress RS600 from Thermo Electron Corp.
- Rotary Evaporation System - R-210/215 from Büchi
- Spinner - CZ-650 from Laurell
- Spinner - SMA AC 6000
- Stove - UNB 500 from Memmert
- Tubular Furnace - ST 1002540 from HOBERSAL
- Ultrasonic Wire Bonder - 4526 from Kuliche & Soffa
- Vacuum Line
NANOQUIM @ 2017